Self-calibrating laser semiconductor accelerometer
US7980115B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2008 |
| Grant date | Jul 19, 2011 |
| Priority date | — |
| Expiry date | Jul 9, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A self-calibrating laser accelerometer system that continuously removes bias errors from acceleration measurements under dynamic operating conditions has a frame with a pair of essentially identical mass modulated accelerometers positioned within the frame. Each accelerometer includes a proof mass mounted to the sensing element frame by a flexure suspension. The proof mass is arranged to rotate about an output axis in response to acceleration of the sensing element frame along an input axis. The first proof mass includes a secondary mass that is movable between a first stable position on a first side of the output axis and a second stable position on a second side of the output axis to provide mass modulation of the first proof mass and to provide a selectively reversible polarity to the input axis and to provide self-calibration of bias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.