Patent · US Active

Method and apparatus for a micromachined multisensor

US7980133B2 · kind B2 · utility

6Cited by

8References

18Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

John A. Geen · Tewksbury, US
Jinbo Kuang · Acton, US
Vineet Kumar · Beaverton, US

Key dates

Filing date	Aug 19, 2008
Grant date	Jul 19, 2011
Priority date	—
Expiry date	Mar 3, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01P15/125
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.