Microelectromechanical gyroscope with self-test function and control method
US7980135B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2008 |
| Grant date | Jul 19, 2011 |
| Priority date | — |
| Expiry date | Jan 11, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical gyroscope having a microstructure that includes a first mass and a second mass, wherein the first mass is oscillatable according to a first axis and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis, in response to a rotation of the microstructure, a driving device coupled to the microstructure to maintain the first mass in oscillation at the driving frequency, and a reading device that detects displacements of the second mass according to the second axis. The gyroscope is provided with a self-test actuation system coupled to the second mass for applying an electrostatic force at the driving frequency so as to move the second mass according to the second axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.