Electrostatic actuator and method of making the electrostatic actuator
US7980671B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2006 |
| Grant date | Jul 19, 2011 |
| Priority date | — |
| Expiry date | Nov 30, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/053
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application comprises a first electrode and a second electrode. The second electrode is positioned in proximity to the first electrode so as to provide a gap between the first electrode and the second electrode. The first electrode is capable of being deflected toward the second electrode. A dielectric structure comprising a dielectric landing post is positioned in the gap between the first electrode and the second electrode, the dielectric structure extending over a greater surface of the gap than the landing post. The landing post protrudes out into the gap so as to limit the minimum contact spacing between the first electrode and the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.