System for preventing contaminants from reaching a gas purifier
US7981195B2 · kind B2 · utility
2Cited by
16References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2008 |
| Grant date | Jul 19, 2011 |
| Priority date | — |
| Expiry date | Apr 25, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25J2290/62
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention is directed to the prevention of an exothermic reaction in the gas purifier of an ultra-high purity gas system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.