Patent · US Active

Quartz glass blank and method for producing said blank

US7981824B2 · kind B2 · utility

6Cited by

6References

13Claims

0Family size

Assignee

HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

Wolfgang Englisch · Kelkheim, DE
Ralf Takke · Hanau, DE
Bodo Kuehn · Gelnhausen, DE
Bruno Uebbing · Alzenau, DE
Rainer Koeppler · Seligenstadt, DE

Key dates

Filing date	May 11, 2005
Grant date	Jul 19, 2011
Priority date	—
Expiry date	Sep 8, 2027

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC03C2201/42
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

The present invention relates to a quartz glass blank for an optical component for transmitting radiation of a wavelength of 15 nm and shorter, the blank consisting of highly pure quartz glass, doped with titanium and/or fluorine, which is distinguished by an extremely high homogeneity. The homogeneity relates to the following features: Said quartz glass blank can only be obtained in that a doped quartz glass obtained by flame hydrolysis of a compound containing silicon, titanium and/or fluorine is formed as a large volume rod-shaped starting body into a homogeneous quartz glass blank using several forming steps and is homogenized.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.