Micro-electro mechanical system using snapping tabs, comb and parallel plate actuation
US7986073B2 · kind B2 · utility
6Cited by
0References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 19, 2010 |
| Grant date | Jul 26, 2011 |
| Priority date | — |
| Expiry date | Nov 19, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.