Patent · US Active

Measurement of multiple surface test objects with frequency scanning interferometer

US7986414B2 · kind B2 · utility

2Cited by

5References

25Claims

0Family size

Assignee

CORNING INCORPORATED · US

Inventors

Christopher Lee · Pleasanton, US
Mark Joseph Tronolone · Fairport, US

Key dates

Filing date	Jan 30, 2009
Grant date	Jul 26, 2011
Priority date	—
Expiry date	Apr 15, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/2441
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.