Scanner arrangement and method for optically scanning an object

US7986456B2 · kind B2 · utility

Assignee

• WESTFÄLISCHE WILHELMS-UNIVERSITÄT MÜNSTER · DE

Inventors

• Dieter Frekers · Havixbeck, DE
• Christian Wachsmann · Hachenburg, DE
• Ishak Aksit · Hachenburg, DE

Key dates

• Filing date: Aug 30, 2005
• Grant date: Jul 26, 2011
• Expiry date: Jun 16, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/002
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A scanner arrangement (50), in particular a scanning microscope, for optically scanning an object (101) in a sequence of scanning steps, has: a drivable moving object stage (40) and an objective assembly (4, 7-10), which has a front objective lens (9, 103) on an objective lens carriage (8) which can be moved parallel to the object stage (40) by a carriage drive (5, 6, 10, 11), wherein the object stage (40) can be driven during the sequence of scanning steps in order to achieve a continuous movement and the objective lens carriage (8) with the front objective lens (9, 103) can be driven in each of the scanning steps for a forward movement step, in which the front objective lens (9, 103) is moved synchronously with the object stage (40) out of an initial position, and in each case between successive scanning steps for a backward movement into the initial position, with the object (101) being able to be optically scanned during the continuous movement of the object stage (40).