Tweezer-equipped scanning probe microscope and transfer method
US7987703B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 30, 2008 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Apr 22, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.