Coupled pivoted acceleration sensors
US7987716B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2008 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Nov 11, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/123
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pivoted acceleration sensor has a substrate that is substantially parallel to first and second surfaces. A reference frame is provided. A first unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through first and second strain gauges. The first and second strain gauges are located along a pivot axis of the first unbalanced seismic mass. The first and second strain gauges are first and second piezoresistors on the first surface of the substrate, A second unbalanced seismic mass is flexibly coupled with the first unbalanced seismic mass. The second unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through third and fourth strain gauges. The third and fourth strain gauges are located along a pivot axis of the second unbalanced seismic mass. The third and fourth strain gauges are third and fourth piezoresistors on the first surface of the substrate. Metallization on the first surface of the substrate is configured to connect the first, second, third and fourth piezoresistors in a bridge configuration without crossovers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.