Patent · US Active

Method for continuous atmospheric pressure plasma treatment of workpieces

US7989034B2 · kind B2 · utility

1Cited by

4References

19Claims

0Family size

Assignee

Softal Corona & Plasma GmbH · DE

Inventors

Eckhard Prinz · Schwarzenbek, DE
Peter Palm · Gerolsheim, DE
Frank Forster · Oberkirch, DE

Key dates

Filing date	Jun 19, 2006
Grant date	Aug 2, 2011
Priority date	—
Expiry date	Nov 14, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/2437
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A method for continuous atmospheric plasma treatment of an electrically insulating workpiece. The workpiece is arranged at a distance beneath at least one high-voltage electrode which extends across a direction of movement. The electrode and the workpiece are set in motion relative to one another. The high voltage being applied to the high-voltage electrode, preferably is in the form of an AC voltage. A first space situated between the high-voltage electrode and the workpiece is filled with a first atmosphere and a second space on the side of the workpiece facing away from the high-voltage electrode is filled with a second atmosphere that is different from the first atmosphere. The second space is adjacent to a back side of the workpiece. The choice of high voltage and of the first and second atmospheres is made in such a way that a plasma discharge is ignited in the second atmosphere.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.