Hydrophobic surface coating with low wetting hysteresis, method for depositing same, microcomponent and use
US7989056B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2005 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Jun 29, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L3/5027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A hydrophobic surface coating, preferably obtained by chemical vapor deposition, comprises at least an upper thin layer formed by a compound selected from the group consisting of SiCxOy:H with x comprised between 1.4 and 2 and y comprised between 0.8 and 1.4 and SiCx′Ny′:H with x′ comprised between 1.2 and 1.4 and y′ comprised between 0.6 and 0.8, so as to obtain a free surface with a low wetting hysteresis. Such a hydrophobic surface coating can be arranged on the free surface of a microcomponent comprising at least one substrate provided with, an electrode array and particularly suitable for moving drops of liquid by electrowetting on dielectric.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.