Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements
US7989249B2 · kind B2 · utility
6Cited by
2References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2009 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Feb 4, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.