Patent · US Active

Vertical electrical device

US7989915B2 · kind B2 · utility

0Cited by
18References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 11, 2006
Grant dateAug 2, 2011
Priority date
Expiry dateJul 16, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3011
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A vertical electrical device includes a region in a substrate extending from a surface of the substrate, the region having an inner wall and an outer wall circumscribing the inner wall. An inner electrically conductive layer is disposed on the inner wall and an outer electrically conductive layer is disposed on the outer wall, with an electrically insulative material disposed between the inner and outer layers. An electrical conductor in the substrate is bounded by the inner electrically conductive layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.