Delivering particulate material to a vaporization zone
US7993459B2 · kind B2 · utility
2Cited by
10References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2005 |
| Grant date | Aug 9, 2011 |
| Priority date | — |
| Expiry date | Nov 12, 2029 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to form a layer. The improvement includes providing a cartridge defining a cavity for receiving material under a controlled environment for preventing material contamination, receiving material from the cavity and translating such received material along a feed path to the vaporization zone and removably securing the cartridge to the deposition chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.