Patent · US Active

Method for making nanostructures

US7993703B2 · kind B2 · utility

1Cited by

8References

18Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Thomas Goislard de Monsabert · Meylan, FR
Jean Dijon · Le Pont-de-Claix, FR

Key dates

Filing date	May 29, 2006
Grant date	Aug 9, 2011
Priority date	—
Expiry date	Mar 23, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH10K85/221
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A process for making nanostructures on a support, including: supplying a support including a surface layer on one of its faces, covering the surface layer by a catalyst layer structured according to a pattern exposing areas of the surface layer covered by the catalyst and areas of the surface layer not covered by the catalyst, etching the thickness of the surface layer in the areas not covered by the catalyst layer, and selectively growing nanostructures on the areas of the surface layer covered by the catalyst. The process can also be used to make cathode structures with electrically independent nanostructures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.