Spectral interferometry method and apparatus
US7995207B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 2004 |
| Grant date | Aug 9, 2011 |
| Priority date | — |
| Expiry date | Feb 15, 2026 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/7257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectral interferometry apparatus and method is provided to supply unambiguous profiles (A—scans free of mirror terms) of the reflectivity versus optical path difference and make difference between the positive and negative optical path difference or provide output in a selected interval of optical path differences. The apparatus comprises object optics that transfer a beam from an optical source to a target object (55) to produce an object beam and reference optics that produce a reference beam. Displacing means (57) are provided to produce a gap (g) between the object beam (41′) and the reference beam (42′). Optical spectrum dispersing means (7) such as a grating or a prism receive the two relatively displaced beams, and disperse their spectral content onto a reading element such as a CCD. The combination of the displacing means and the optical spectrum dispersing means creates an intrinsic optical delay between the wavetrains of the object beam and the reference beam which can be used with the optical path difference in the interferometer to generate a channeled spectrum for the optical path difference in the interferometer on the reading element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.