Patent · US Active

Miniaturized spring element and method for producing the spring element

US7997125B2 · kind B2 · utility

11Cited by

4References

28Claims

0Family size

Assignees

Nanoscale Systems, Nanoss GmbH · DE
JOHANN WOLFGANG GOETHE-UNIVERSITAT · DE

Inventors

Alexander Kaya · Roßdorf, DE
Michael Huth · Bourbonnais, US

Key dates

Filing date	Aug 1, 2008
Grant date	Aug 16, 2011
Priority date	—
Expiry date	Apr 4, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/956
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.