Bidirectional readout circuit for detecting direction and amplitude of capacitive MEMS accelerometers
US7997137B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2008 |
| Grant date | Aug 16, 2011 |
| Priority date | — |
| Expiry date | Mar 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P13/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.