Methods of and apparatus for cleaning and conveying a substrate

US7997289B1 · kind B1 · utility

Assignee

• Xyratex Technology Limited · GB

Inventors

• Dave Frost · Scotts Valley, US
• Sean Harbison · Scotts Valley, US
• Yassin Mehmandoust · Berkeley, US
• Mike Frocappa · Scotts Valley, US

Key dates

• Filing date: Oct 2, 2007
• Grant date: Aug 16, 2011
• Expiry date: Feb 19, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67046
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Discs roll along an inclined track through a chamber to expose opposite disc sides for cleaning. Energized fluid directed against the opposite sides removes particles from the discs, the fluid and particles exiting the chamber. Stop pins control a time period for cleaning and transporting the discs by selectively blocking or releasing the discs. The discs are stopped at many sections of a transducer, the sections being tailored to provide various cleaning characteristics. Within the chamber, the chamber is configured to minimize particles that originate other than by being adhered to the disc at a time when the disc is introduced into the chamber. Internal chamber configuration also minimizes retention of particles so that particles removed from one disc do not linger in the chamber for possible transfer to a disc that is cleaned in the same chamber at a later time.