Apparatus and method for forming optical black pixels with uniformly low dark current

US7999340B2 · kind B2 · utility

Assignee

• ALTASENS, INC. · US

Inventors

• Giuseppe Rossi · Pasadena, US
• Lester J. Kozlowski · Simi Valley, US
• Henry Lin · Hsinchu, TW
• John Richardson · Westlake Village, US
• Gregory Chow · Honolulu, US
• Gaurang Patel · Newbury Park, US

Key dates

• Filing date: Mar 7, 2007
• Grant date: Aug 16, 2011
• Expiry date: Apr 4, 2028

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/8057

Abstract

An apparatus and method for forming optical black pixels having uniformly low dark current. Optical Black opacity is increased without having to increase Ti/TiN layer thickness. A hybrid approach is utilized combining a Ti/TiN OB layer in conjunction with in-pixel metal stubs that further occlude the focal radius of each pixel's incoming light beam. Additional metal layers can be used to increase the opacity into the infrared region.