Micro-fabricated devices having a suspended membrane or plate structure
US7999440B2 · kind B2 · utility
8Cited by
58References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2006 |
| Grant date | Aug 16, 2011 |
| Priority date | — |
| Expiry date | Apr 16, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/13
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to micro-fabricated devices having a suspended membrane or plate structure and micro-fabrication techniques for making such devices. A substrate defines a cavity passing through the substrate, and the cavity defines a first opening. An intermediate portion is disposed over the substrate and defines a second opening. The second opening is larger in size than the first opening, and the dimensions of the second opening are controlled according to a parameter associated with performance of the device. A membrane is positioned adjacent the second opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.