Cross purge valve and container assembly
US8002247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2009 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Jan 5, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8376
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.