Heat treatment jig and heat treatment jig set
US8002542B2 · kind B2 · utility
0Cited by
12References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 2007 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Jun 18, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heat treatment jig includes a holding concave portion to hold an object and a void part formed near the holding concave portion and a thermal history variation of the object in a heat treatment process is reduced thereby.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.