Method for metallizing semiconductor elements and use thereof

US8003530B2 · kind B2 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Andreas Grohe · Glückstadt, DE
• Jan Nekarda · Glückstadt, DE
• Oliver Schultz-Wittmann · Sunnyvale, US

Key dates

• Filing date: Mar 6, 2009
• Grant date: Aug 23, 2011
• Expiry date: Mar 6, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50

Abstract

The present invention relates to a method for metallizing semiconductor components in which aluminium is used. In particular in the case of products in which the process costs play a big part, such as e.g. solar cells based on silicon, a cost advantage can be achieved with the invention. In addition, the present invention relates to the use of the method, for example in the production of solar cells.