Patent · US Active

Microfabricated devices and method for fabricating microfabricated devices

US8004021B2 · kind B2 · utility

4Cited by
39References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 2007
Grant dateAug 23, 2011
Priority date—
Expiry dateApr 17, 2027

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2207/115
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Microfabricated devices for operation in a fluid that include a substrate that has a first and second surface and a first electrode material layer located over the first surface of the substrate. The devices have a piezoelectric material layer located over the first electrode material layer and a second electrode material layer located over the piezoelectric material layer. The devices also include a layer of isolation material located over the second electrode material layer that at least one of chemically or electrically isolates a portion of the second electrode material layer from a fluid. Some devices include a layer of conductive material located over the layer of isolation material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.