Patent · US Active

Sensor

US8007169B2 · kind B2 · utility

5Cited by

1References

14Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Bernhard Opitz · Leonberg, DE
Ando Feyh · Palo Alto, US
Daniel Herrmann · Lörrach, DE
Oliver Wolst · Walzbachtal, DE

Key dates

Filing date	Jun 13, 2006
Grant date	Aug 30, 2011
Priority date	—
Expiry date	May 2, 2027

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49117
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.