Multiple element electrode cMUT devices and fabrication methods
US8008835B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 28, 2005 |
| Grant date | Aug 30, 2011 |
| Priority date | — |
| Expiry date | Dec 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/2406
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. A cMUT device generally comprises a top electrode disposed within a membrane, a bottom electrode disposed on a substrate, and a cavity between the membrane and the bottom electrode. In a preferred embodiment of the present invention, at least one of the first electrode and the second electrode comprises a plurality of electrode elements. The electrode elements can be positioned and energized to shape the membrane and efficiently transmit and receive ultrasonic energy, such as ultrasonic waves. Other embodiments are also claimed and described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.