SPM probe with shortened cantilever

US8011016B2 · kind B2 · utility

Assignee

• NanoWorld AG · CH

Inventors

• Thomas Sulzbach · Cologne, DE
• Christoph Richter · Berlin, DE

Key dates

• Filing date: Mar 12, 2009
• Grant date: Aug 30, 2011
• Expiry date: Jan 1, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q70/16
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face side flank of the support element, and with the plane extending between the scanning tip and a theoretical straight line passing through one of the critical corners, parallel t…