Patent · US Active

Fabrication method of a nanotube-based electric connection having air gaps

US8011091B2 · kind B2 · utility

0Cited by

2References

10Claims

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Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Frederic Gaillard · Grenoble, FR
Jean-Christophe Coiffic · Grenoble, FR

Key dates

Filing date	Jul 8, 2008
Grant date	Sep 6, 2011
Priority date	—
Expiry date	Dec 12, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49162
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A target layer with holes is formed on a bottom conducting layer. Nanotubes are formed in the holes from the bottom conducting layer. A flat insulating layer is then deposited on the target layer, the nanotubes passing through the insulating layer. Air gaps are then formed by selective decomposition of the target layer. The decomposition agent and/or decomposition by-products use the walls and the central holes of the nanotubes to pass between the target layer and the outside. After decomposition, the top conducting layer is formed on the insulating layer. The nanotubes then electrically connect the conducting layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.