Patent · US Active

Leakage detection method using micromachined-thermal-convection accelerometer

US8011226B2 · kind B2 · utility

3Cited by

14References

16Claims

0Family size

Assignee

MEMSIC, INC. · US

Inventors

Yaping Hua · 安丰镇, CN
Zongya Li · Wuxi, CN
Hanwu Xiao · 安丰镇, CN

Key dates

Filing date	Aug 26, 2008
Grant date	Sep 6, 2011
Priority date	—
Expiry date	Nov 2, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01P15/008
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and device for identifying leaks in or a leakage rate of an integrated circuit package. The method and device include integrating a micromachined-thermal-convection accelerometer in the integrated circuit package and evaluating the initial and subsequent sensitivities of the accelerometer. A change in sensitivity with time provides indicia of a leak and a measure of leakage rate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.