Apparatus and method for coating an areal substrate

US8012260B2 · kind B2 · utility

Assignee

• Applied Materials GmbH & Co. KG · DE

Inventors

• Uwe Hoffmann · Leverkusen, DE
• Jutta Trube · Mömbris, DE
• Dieter Haas · Bruchköbel, DE

Key dates

• Filing date: Jun 6, 2002
• Grant date: Sep 6, 2011
• Expiry date: Jun 6, 2022

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/12
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.