Three-terminal metal-oxide-metal capacitor
US8014124B2 · kind B2 · utility
5Cited by
7References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 3, 2009 |
| Grant date | Sep 6, 2011 |
| Priority date | — |
| Expiry date | Mar 12, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An MOM capacitor includes a first metal plate; a second metal plate in close proximity to the first metal plate; a third metal plate in close proximity to the first metal plate, and at least one oxide layer interposed between the first, second and three vertical metal plates. The first, second and third metal plate are connected to three different terminals of an integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.