Patent · US Active

Method for producing air gaps using nanotubes

US8017025B2 · kind B2 · utility

4Cited by

1References

10Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Frederic Gaillard · Grenoble, FR
Jean-Christophe Coiffic · Grenoble, FR

Key dates

Filing date	May 9, 2008
Grant date	Sep 13, 2011
Priority date	—
Expiry date	Jul 14, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/888
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A target layer comprising at least one degradable material is deposited on a support. Nanotubes are then formed on the degradable material of the target layer before deposition of an insulating layer is performed. Degradation of the degradable material and elimination of degradation sub-products are then performed by means of the nanotubes passing through the insulating layer thus forming air gaps in the target layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.