Electron source for a vacuum pressure measuring device
US8018234B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2007 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Aug 14, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.