Transistor-based micrometric or nanometric resonant device
US8018291B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2010 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Apr 24, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02259
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.