Methods of making copper selenium precursor compositions with a targeted copper selenide content and precursor compositions and thin films resulting therefrom
US8021641B2 · kind B2 · utility
4Cited by
83References
30Claims
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Key dates
| Filing date | Feb 4, 2010 |
| Grant date | Sep 20, 2011 |
| Priority date | — |
| Expiry date | Feb 4, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2002/88
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Precursor compositions containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semi-conductor applications. Methods of forming the precursor compositions using primary amine solvents and methods of forming the thin films wherein the selection of temperature and duration of heating controls the formation of a targeted species of copper selenide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.