Monolithic multinozzle emitters for nanoelectrospray mass spectrometry
US8022361B2 · kind B2 · utility
8Cited by
1References
19Claims
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Key dates
| Filing date | Oct 28, 2008 |
| Grant date | Sep 20, 2011 |
| Priority date | — |
| Expiry date | Nov 20, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L3/5027
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Novel and significantly simplified procedures for fabrication of fully integrated nanoelectrospray emitters have been described. For nanofabricated monolithic multinozzle emitters (NM2 emitters), a bottom up approach using silicon nanowires on a silicon sliver is used. For microfabricated monolithic multinozzle emitters (M3 emitters), a top down approach using MEMS techniques on silicon wafers is used. The emitters have performance comparable to that of commercially-available silica capillary emitters for nanoelectrospray mass spectrometry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.