Vacuum plasma generator
US8025775B2 · kind B2 · utility
4Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2003 |
| Grant date | Sep 27, 2011 |
| Priority date | — |
| Expiry date | Dec 3, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3444
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vacuum plasma generator with an output for feeding a plasma discharge for treatment of workpieces in a vacuum chamber has a connection for the junction to AC voltage mains, a rectifier connected to a converter with a control input for the setting and/or regulation of the converter output voltage, and a controlled full bridge circuit connected to the converter output with a potential-free generator output, which transposes the converter output voltage into pulses of 1 to 500 kHz. A potential-isolating transformer is switched into the bridge for the galvanic decoupling of the generator output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.