Biosensor devices and method for fabricating the same

US8026559B2 · kind B2 · utility

Assignee

• VISERA TECHNOLOGIES COMPANY LIMITED · TW

Inventors

• I-Hsiu Chen · Taipei, TW
• Chung-Jung Hsu · Taipei, TW

Key dates

• Filing date: Nov 27, 2009
• Grant date: Sep 27, 2011
• Expiry date: Jan 7, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/807
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A biosensor device is provided, including a first semiconductor layer formed over an interconnect structure. A plurality of detection elements are formed in the first semiconductor layer. An optical filter layer is formed over and physically contacts the first semiconductor layer. A second semiconductor layer is formed over the optical filter layer, having opposing first and second surfaces, wherein the first surface physically contacts the optical filter layer. A plurality of isolation walls are formed over the second semiconductor layer from the second surface thereof, defining a plurality of micro-wells over the second semiconductor layer, wherein the isolation walls and the second semiconductor layer comprises the same material, and the micro-wells are correspondingly arranged with the detection elements. An immobilization layer is formed over the second semiconductor layer exposed by the micro-wells and a plurality of capture molecules are formed over the immobilization layer in the micro-wells.