Method for fabricating a microfluidic component comprising at least one microchannel filled with nanostructures
US8029863B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2008 |
| Grant date | Oct 4, 2011 |
| Priority date | — |
| Expiry date | May 13, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/038
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A microfluidic component comprises at least one closed microchannel filled with nanostructures. The microchannel is produced by previously forming an opening delineating a bottom wall and two opposite side walls of the microchannel in a surface of a substrate. The nanostructures filling said microchannel are formed by in situ growth to constitute a layer of metallic catalyst deposited on said side walls and on said wall bottom. The microchannel is closed, before the nanostructures are formed, by sealing a protective cover onto said surface of the substrate. Sealing is obtained by formation of an eutectic compound between a material of the cover and the metal of the catalyst used for in situ growth of the nanostructures and deposited on the surface of the substrate designed to come into contact with the cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.