Substrate patterning using a digital optical chemistry micromirror imager
US8030056B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 27, 2010 |
| Grant date | Oct 4, 2011 |
| Priority date | — |
| Expiry date | Aug 27, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/1278
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for catalyzing a reaction on a substrate (24) comprising, a light source (12), a micromirror (16) positioned to redirect light (14) from the light source (12) toward a substrate (24) wherein the redirected light (14) catalyzes a chemical reaction proximate a substrate (24), is disclosed. A computer (18) is connected to; and controls, the positioning of mirrors within the micromirror (16) to specifically redirect light to specific portions of a substrate. The substrate (24) can be placed in a reaction chamber (50), wherein the light (14) that is redirected by the micromirror (16) catalyzes a chemical reaction proximate a substrate (24).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.