Device sensitive to a movement comprising at least one transistor

US8030690B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Eric Ollier · Grenoble, FR
• Laurent Duraffourg · Voiron, FR
• Philippe Andreucci · Moirans, FR

Key dates

• Filing date: May 16, 2007
• Grant date: Oct 4, 2011
• Expiry date: May 30, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/082
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12).