Patent · US Active

MEMS pressure sensor and housing therefor

US8033177B2 · kind B2 · utility

4Cited by

5References

5Claims

0Family size

Assignee

PACESETTER, INC. · US

Inventors

George W. Keilman · Bothell, US
Tim Johnson · Raymond, US

Key dates

Filing date	Feb 9, 2009
Grant date	Oct 11, 2011
Priority date	—
Expiry date	Jan 30, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0645
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measured. Pressure state of the fluid being measured is transferred from the housing diaphragm through an electrically insulating intermediary fluid to the MEMS diaphragm thereby allowing the MEMS pressure sensor die to indirectly sample pressure state of the fluid being measured. Electrically conductive support members and electrically conductive solid vias are used to electrically couple circuitry of the MEMS pressure sensor die to external wires outside the housing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.