Patent · US Active

Pressure-measuring cell

US8033178B2 · kind B2 · utility

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16Claims

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Assignee

ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

Dietfried Burczyk · Teltow, DE
Anh Tuan Tham · Berlin, DE
Dieter Stolze · Potsdam, DE

Key dates

Filing date	Dec 22, 2006
Grant date	Oct 11, 2011
Priority date	—
Expiry date	Jun 24, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0055
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor comprises a sensor platform; a measuring membrane, or diaphragm, which is held by the sensor platform, and can have a pressure applied to it and is deformable as a function of pressure; and at least two resistance elements having an AlxGa1—xN layer. At least a first resistance element of the at least two resistance elements is arranged on the measuring membrane, or diaphragm and has a deformation-dependent resistance value. The pressure sensor can be operated using a measurement circuit to register a signal which depends on the resistance values of the at least two resistance elements in the plane of the AlxGa1—xN layer. Four resistance elements are preferably provided in a full bridge.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.