Microwave plasma nozzle with enhanced plume stability and heating efficiency
US8035057B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 7, 2005 |
| Grant date | Oct 11, 2011 |
| Priority date | — |
| Expiry date | Feb 8, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/463
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.