Apparatus for repairing circuit pattern and method for manufacturing display apparatus using the same
US8035058B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2005 |
| Grant date | Oct 11, 2011 |
| Priority date | — |
| Expiry date | Sep 14, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.