Patent · US Active

Micromechanical device which has cavities having different internal atmospheric pressures

US8035209B2 · kind B2 · utility

13Cited by

0References

3Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Julian Gonska · Reutlingen, DE
Ralf Hausner · Reutlingen, DE

Key dates

Filing date	Aug 4, 2009
Grant date	Oct 11, 2011
Priority date	—
Expiry date	Dec 18, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24744
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical device having a substrate wafer has at least one first cavity and one second cavity, the cavities being hermetically separated from each other, the first cavity having a different internal atmospheric pressure than the second cavity. The cavities are capped by a thin film cap. A method is for manufacturing a micromechanical device which has a thin film cap having cavities of different internal atmospheric pressures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.