MEMS device with off-axis actuator
US8035874B1 · kind B1 · utility
5Cited by
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19Claims
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Key dates
| Filing date | Feb 25, 2009 |
| Grant date | Oct 11, 2011 |
| Priority date | — |
| Expiry date | Mar 6, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.